420 GHz subharmonic mixer based on heterogeneous integrated Schottky diode

This paper describes 420GHz subharmonic mixer based on heterogeneous integrated schottky diode designed by University of Electronic Science and Technology of China (UESTC) and fabricated by China Electronics Technology Group Corporation-13 (CETC-13). The whole circuit including schottky diodes is integrated directly on the 50 μm quartz instead of the traditional 12 um GaAs substrate thus the circuit is much easier to manufacture and the cost is much cheaper. The 3D model of schottky diode is built up in the HFSS to extract the parasitic parameters introduced by the diode package when the operating frequency is extremely high. Source-pull and load-pull methods are used to get the optimum RF, LO and IF embedding impedance in the ADS. Measured results show that the minimum conversion loss is 10 dB at 419GHz and 422GHz, SSB conversion loss is less than 14.7 dB from 400GHz to 440GHz when the LO power is 5.2 dBm at 210GHz.